Abstract
Gas kinetic models can tell us a lot about how a plasma system operates on the atomic and/or molecular level. Here, we are using a commercial Boltzmann solver to determine the electron energy distribution functions associated with an argon plasma produced by a commercial plasma system. From the EEDF we can gain insight about the electron temperature and electric field inside the device.
Files
Metadata
- Event location
Nesbitt 3110
- Event date
3 November 2018
- Date submitted
19 July 2022