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Abstract

Gas kinetic models can tell us a lot about how a plasma system operates on the atomic and/or molecular level. Here, we are using a commercial Boltzmann solver to determine the electron energy distribution functions associated with an argon plasma produced by a commercial plasma system. From the EEDF we can gain insight about the electron temperature and electric field inside the device.

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19 Jul 2022
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  • Event location
    • Nesbitt 3110

  • Event date
    • 3 November 2018

  • Date submitted

    19 July 2022